
Journal of the Electrochemical Society p. 3274 - 3278 (1989)
Update date:2022-08-10
Topics:
Schleich
Chang
Barberio
Hanson
Amorphous molybdenum trisulfide (MoS3) is a promising candidate as a host material in a lithium insertion battery. Thin films of MoS3 have been prepared by chemical vapor deposition from molybdenum hexafluoride (MoF6) and hexamethyldisilthiane (HMDST). Continuous, adherent films were obtained at deposition temperatures in the range of 150° to 400°C on aluminum, nickel, silica, and alumina substrates. Infrared analyses indicate that deposition temperatures between 200° and 250°C produce the purest films. The best electrochemical performance was achieved on films deposited in the range of 210°C to 240°C, which corresponded to those films analytically determined to be MoS3.
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