Inorganic Materials p. 1199 - 1204 (2011)
Update date:2022-08-11
Topics:
Korobeinichev
Shmakov
Chernov
Kosinova
Sulyaeva
Kuznetsov
We have studied the kinetics of BC x N y chemical vapor deposition through trimethylamine borane decomposition at atmospheric pressure. The rate constant of the heterogeneous interaction between trimethylamine borane and an adsorption center has been determined to be k s 0 = 2.7 × 107exp(-10560/T) cm/s. The obtained kinetic parameters of the reaction fully determine the growth rate of nanocrystalline carbonitride films under kinetic control. The film thickness has been determined as a function of time, temperature, reactant concentration, and reactor dimensions.
View MoreNanjing Ruizhi Industry & Technologh Co.,Ltd.
Contact:+86-25-86808110
Address:441-4-A5,NO.12 Longzang Avenue,Yuhuatai District,210039,Nanjing
Shanghai Xinda Pharmaceuticals Co., Ltd.
Contact:86-21-33692333-8008
Address:999 Linxian Road, Jinshan Industrial Park, Shanghai, China
Contact:+86-570-4336358
Address:No.87 Building,Tianqian,Sidu Town
Contact:+86-633-8332928
Address:No.1,Huanghai Yilu.Rizhao,Shandong
Contact:021
Address:Pudong
Doi:10.1021/ja01583a060
(1956)Doi:10.1021/acs.orglett.6b00494
(2016)Doi:10.1007/s11094-020-02298-5
(2020)Doi:10.1016/j.molcata.2007.09.030
(2008)Doi:10.1007/s11164-019-03737-z
(2019)Doi:10.1134/S0036024411010079
(2011)