Direct kinetic studies of SiH3 + SiH3, H, CCl4, SiD4, Si2H6, and C3H6 by tunable infrared diode laser spectroscopy

Article abstract of DOI:10.1063/1.461707

Gas phase reactions of silyl radical, SiH3, are investigated at room temperature using tunable diode laser flash kinetic spectroscopy.Photolytic generation of silyl at 193 and 248 nm is demonstrated using several different precursor systems.The silyl recombination reaction, SiH3 + SiH3 -> Si2H6, is studied by quantitative measurement of SiH3 and attendant product densities.Analysis yields a refinement of the rate constant, k_rc = (7.9 +/- 2.9) * 10^-11 cm³ molecule^-1 s^-1.By modeling silyl densities following photolysis of HCl in SiH4, bimolecular rate constants for H + SiH3 and H + SiH4 are determined to be (2 +/- 1) * 10^-11 and (2.5 +/- 0.5) * 10^-13 cm³ molecule^-1 s^-1, respectively.Reactions of SiH3 with SiD4, Si2H6, CCl4, and C3H6 (propylene) are studied under pseudo-first-order conditions.Derived upper limits to the rate constants show these reactions to be slow at room temperature.The data demonstrate the reactivity of silyl with open-shell (radical) species and the general inertness of silyl toward closed shell molecules.Under typical chemical vapor deposition conditions, SiH3 is, therefore, a kinetically long-lived species in the gas phase and consequently a potentially important film forming species under plasma and photochemical deposition conditions.

Full text of DOI:10.1063/1.461707

Direct kinetic studies of SiH3+SiH3, H, CCl4, SiD4, Si2H6, and C3H6 by
tunable infrared diode laser spectroscopy
S. K. Loh and J. M. Jasinski
Citation: J. Chem. Phys. 95, 4914 (1991); doi: 10.1063/1.461707
View online: http://dx.doi.org/10.1063/1.461707
View Table of Contents: http://jcp.aip.org/resource/1/JCPSA6/v95/i7
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Downloaded 02 Aug 2013 to 128.206.9.138. This article is copyrighted as indicated in the abstract. Reuse of AIP content is subject to the terms at: http://jcp.aip.org/about/rights_and_permissions

Downloaded 02 Aug 2013 to 128.206.9.138. This article is copyrighted as indicated in the abstract. Reuse of AIP content is subject to the terms at: http://jcp.aip.org/about/rights_and_permissions

Downloaded 02 Aug 2013 to 128.206.9.138. This article is copyrighted as indicated in the abstract. Reuse of AIP content is subject to the terms at: http://jcp.aip.org/about/rights_and_permissions

Downloaded 02 Aug 2013 to 128.206.9.138. This article is copyrighted as indicated in the abstract. Reuse of AIP content is subject to the terms at: http://jcp.aip.org/about/rights_and_permissions

Downloaded 02 Aug 2013 to 128.206.9.138. This article is copyrighted as indicated in the abstract. Reuse of AIP content is subject to the terms at: http://jcp.aip.org/about/rights_and_permissions

Downloaded 02 Aug 2013 to 128.206.9.138. This article is copyrighted as indicated in the abstract. Reuse of AIP content is subject to the terms at: http://jcp.aip.org/about/rights_and_permissions

Downloaded 02 Aug 2013 to 128.206.9.138. This article is copyrighted as indicated in the abstract. Reuse of AIP content is subject to the terms at: http://jcp.aip.org/about/rights_and_permissions

Downloaded 02 Aug 2013 to 128.206.9.138. This article is copyrighted as indicated in the abstract. Reuse of AIP content is subject to the terms at: http://jcp.aip.org/about/rights_and_permissions

Downloaded 02 Aug 2013 to 128.206.9.138. This article is copyrighted as indicated in the abstract. Reuse of AIP content is subject to the terms at: http://jcp.aip.org/about/rights_and_permissions

Downloaded 02 Aug 2013 to 128.206.9.138. This article is copyrighted as indicated in the abstract. Reuse of AIP content is subject to the terms at: http://jcp.aip.org/about/rights_and_permissions

Downloaded 02 Aug 2013 to 128.206.9.138. This article is copyrighted as indicated in the abstract. Reuse of AIP content is subject to the terms at: http://jcp.aip.org/about/rights_and_permissions

Downloaded 02 Aug 2013 to 128.206.9.138. This article is copyrighted as indicated in the abstract. Reuse of AIP content is subject to the terms at: http://jcp.aip.org/about/rights_and_permissions

Downloaded 02 Aug 2013 to 128.206.9.138. This article is copyrighted as indicated in the abstract. Reuse of AIP content is subject to the terms at: http://jcp.aip.org/about/rights_and_permissions