
Journal of the Electrochemical Society p. 109 - 112 (1988)
Update date:2022-08-31
Topics:
Gobet
Tannenberger
Electroplating of silicon from solutions of SiHCl//3, SiCl//4, SiBr//4, Si(CH//2CH//3)//4, Si(OCH//2CH//3)//4, Si(OOCCH//3)//4, and Si left bracket N(CH//3)//2 right bracket //4 in tetrahydrofuran, using LiClO//4, TBAP, or TBAB as supporting electrolyte, has been studied. Si-C, Si-O, and Si-N bonds are not reduced. Cyclic voltammetry shows a reduction peak, followed by passivation, for the halogenosilanes. Potentiostatic and galvanostatic deposition on Pt, Au, Ni, Cu glassy carbon, or ITO glass yields smooth layers up to 0. 25 mu m. Thicker layers have cracks. Auger spectroscopy shows C ( approximately equals 8), O( approximately equals 8), and Cl( approximately equals 1. 5) as impurities (atomic percent). This work is pertinent to solar cell fabrication. (Edited author abstact)
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