Polymer CommunicationPoly(2-trimethylsilyl-2-propyl methacrylate-co-γ-butyrolactone-2-yl methacrylate) for ArF lithography
-
Add time:09/07/2019 Source:sciencedirect.com
Poly(2-trimethylsilyl-2-propyl methacrylate-co-γ-butyrolactone-2-yl methacrylate) was synthesized and evaluated as a chemically amplified resist for ArF lithography. The polymer has excellent transmittance at 248 nm and also has a good transmittance at 193 nm. In addition, the polymer possesses good thermal stability up to 200°C, whereas in the presence of an acid the cleavage of the 2-trimethylsilyl-2-propyl ester group begins at about 80°C in a catalytic manner. Patterns of 0.24 μm line/space were obtained with a conventional developer, 2.38 wt.% tetramethylammonium hydroxide aqueous solution, using an ArF excimer laser exposure system.
We also recommend Trading Suppliers and Manufacturers of TRIMETHYLSILYL METHACRYLATE (cas 13688-56-7). Pls Click Website Link as below: cas 13688-56-7 suppliers
Prev:Statistical copolymers of styrene and 2-vinylpyridine with TRIMETHYLSILYL METHACRYLATE (cas 13688-56-7) and trimethylsilyloxyethyl methacrylate
Next:Studies on laser action from polymeric matrices based on TRIMETHYLSILYL METHACRYLATE (cas 13688-56-7) doped with pyrromethene 567 dye) - 【Back】【Close 】【Print】【Add to favorite 】
- Related Information
- Novel photocurable polyethers with methacrylate pendant groups10/01/2019
- Photocrosslinked methacrylated carboxymethyl chitin hydrogels with tunable degradation and mechanical behavior09/27/2019
- Poly(imidazoled glycidyl methacrylate-co-diethyleneglycol methyl ether methacrylate) – A new copolymer with tunable LCST and UCST behavior in water09/26/2019
- Enhancement in cycling stability of LiNi0.5Mn1.5O4/Li cell under high temperature in gel polymer electrolyte system by Tris(trimethylsilyl) borate additive09/25/2019
- Polymer CommunicationSynthesis of poly(2-trimethylsilyl-2-propyl methacrylate) and their application as a dry-developable chemically amplified photoresist09/24/2019
- Syntheses of bis- and tetra(trimethylsilyl) substituted lanthanocene methyl complexes and their catalyses for polymerizations of methyl methacrylate, ε-caprolactone and l-lactide09/10/2019
- Effect of acid structure on deprotection of poly(2-trimethylsilyl-2-propyl methacrylate)09/09/2019
- Studies on laser action from polymeric matrices based on TRIMETHYLSILYL METHACRYLATE (cas 13688-56-7) doped with pyrromethene 567 dye09/08/2019
- Statistical copolymers of styrene and 2-vinylpyridine with TRIMETHYLSILYL METHACRYLATE (cas 13688-56-7) and trimethylsilyloxyethyl methacrylate09/06/2019
