Direct writing of copper film patterns by laser-induced decomposition of copper acetate

Article abstract of DOI:10.1149/1.2095459

Direct writing of patterns is being widely attempted in the field of microelectronic circuit/device manufacture. In this communication we report a technique for both single line and large area deposition of copper through decomposition of copper acetate, (CH₃COO)₂Cu, on alumina substrates. Nd:YAG laser known for its reliability and low maintenance cost as compared to excimer and other gas lasers is used. This technique offers an attractive and economical alternative for manufacture of thin film microcircuits.

Full text of DOI:10.1149/1.2095459

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Downloaded on 2015-05-14 to IP 193.61.135.34 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).