Vapor phase deposition of palladium for electroless copper plating

DOI: 10.1149/1.2096989

Source and publish data:

Journal of the Electrochemical Society p. 1661 - 1666 (1989)

Update date:2022-08-11

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Authors:

Thomas Thomas

Park Park

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Article abstract of DOI:10.1149/1.2096989

The organometallic compound allylcyclopentadienylpalladium can be easily prepared in high yield. The compound exhibits unusual volatility at room temperature. Photochemical decomposition of allylcyclopentadienylpalladium results in the deposition of film

Full text of DOI:10.1149/1.2096989

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