Full text of DOI:10.1063/1.102337

Sequential surface chemical reaction limited growth of high quality Al2O3 dielectrics
G. S. Higashi and C. G. Fleming
Citation: Applied Physics Letters 55, 1963 (1989); doi: 10.1063/1.102337
View online: http://dx.doi.org/10.1063/1.102337
View Table of Contents: http://scitation.aip.org/content/aip/journal/apl/55/19?ver=pdfcov
Published by the AIP Publishing
Articles you may be interested in
High-temperature degradation in plasma-enhanced chemical vapor deposition Al2O3 surface passivation layers
on crystalline silicon
J. Appl. Phys. 116, 054507 (2014); 10.1063/1.4891634
Two-step growth of high quality Bi2Te3 thin films on Al2O3 (0001) by molecular beam epitaxy
Appl. Phys. Lett. 102, 171906 (2013); 10.1063/1.4803717
Surface passivation of c-Si by atmospheric pressure chemical vapor deposition of Al2O3
Appl. Phys. Lett. 100, 202107 (2012); 10.1063/1.4718596
Surface studies of (0001) Al2O3 and the growth of thin films of Cu on Al2O3
J. Vac. Sci. Technol. A 10, 2857 (1992); 10.1116/1.577720
Assignment of a surface vibrational mode by chemical means: Modification of the lattice modes of Al2O3 by a
surface reaction with H2O
J. Chem. Phys. 84, 5906 (1986); 10.1063/1.449902
This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
129.100.58.76 On: Wed, 08 Oct 2014 10:53:42

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
129.100.58.76 On: Wed, 08 Oct 2014 10:53:42

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
129.100.58.76 On: Wed, 08 Oct 2014 10:53:42

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
129.100.58.76 On: Wed, 08 Oct 2014 10:53:42