Reaction between ruthenium dioxide and aluminum nitride in resistor pastes

Article abstract of DOI:10.1007/BF00365170

Thermodynamic considerations predict that RuO₂ used in resistor pastes for AlN as conductive phase, can be reduced by AlN. In air RuO₂ reacts with AlN only to a very small extent. In the presence of a `non-reducible' glass the reaction between RuO₂ and AlN is demonstrated by thermoanalytical, mass spectroscopical and XRD methods. The described reaction could be a reason for bubbles in resistor layers on AlN. A crystallizing glass impedes the complete reaction.