Journal of Materials Science (1993)
Update date:2022-08-17
Topics:
Kretzschmar, C.
Otschik, P.
Jaenicke-Roessler, K.
Schlaefer, D.
Thermodynamic considerations predict that RuO2 used in resistor pastes for AlN as conductive phase, can be reduced by AlN. In air RuO2 reacts with AlN only to a very small extent. In the presence of a `non-reducible' glass the reaction between RuO2 and AlN is demonstrated by thermoanalytical, mass spectroscopical and XRD methods. The described reaction could be a reason for bubbles in resistor layers on AlN. A crystallizing glass impedes the complete reaction.
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