EFFECT OF PH3 PYROLYSIS ON THE MORPHOLOGY AND GROWTH RATE OF InP GROWN BY HYDRIDE VAPOR PHASE EPITAXY.

Article abstract of DOI:10.1149/1.2100482

The incomplete pyrolysis of PH//3 is shown to have a significant effect on the growth rate and morphology of InP grown by hydride vapor phase epitaxy. Using ultraviolet absorption spectroscopy to determine the extent of PH//3 pyrolysis, the growth rate of InP is shown to increase with decreasing PH//3 pyrolysis. Incomplete PH//3 pyrolysis is shown to dramatically increase the formation of growth hillocks on LT AN BR 100 RT AN BR InP epitaxial layers. The use of various metal catalysts to expedite PH//3 pyrolysis to eliminate hillock formation during InP growth is described, and a qualitative model of PH//3 induced hillock growth is presented.

Full text of DOI:10.1149/1.2100482

Downloaded on 2014-11-08 to IP 129.108.9.184 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2014-11-08 to IP 129.108.9.184 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2014-11-08 to IP 129.108.9.184 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2014-11-08 to IP 129.108.9.184 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2014-11-08 to IP 129.108.9.184 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).