Oxygen-diffusion-size effect in electroless metal deposition

Article abstract of DOI:10.1149/1.2095440

Recently, we started to investigate the initial stages of electroless metal deposition on semiconductor substrates on which electrocatalytic metal nuclei were previously locally photodeposited by use of a focused laser beam. Experimentally there appears to be a limit to the size of isolated patterns of electrocatalytic nuclei below which electroless metal deposition does not occur. From a model of electroless deposition on small isolated circular spots we conclude that this inhibition effect is caused by an enhanced supply of oxygen to small patterns due to nonlinear diffusion of dissolved oxygen. Since generally the kinetically determined rate of oxygen reduction is larger than that of oxidation of the reducing agent, the open-circuit potential of nuclei in small patterns cannot be shifted to a sufficiently negative value at which metal deposition is initiated. At relatively large substrates with a high density of small patterns this so-called oxygen-diffusion-size effect may not be noticed since the supply of oxygen is limited by linear diffusion to an effectively planar substrate.

Full text of DOI:10.1149/1.2095440

Downloaded on 2015-07-15 to IP 128.255.6.125 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2015-07-15 to IP 128.255.6.125 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2015-07-15 to IP 128.255.6.125 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2015-07-15 to IP 128.255.6.125 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2015-07-15 to IP 128.255.6.125 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2015-07-15 to IP 128.255.6.125 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).