Journal of the Electrochemical Society p. 2192 - 2198 (1994)
Update date:2022-08-11
Topics:
Wang
Cao
Wang
Zhang
Face-to-face wafers were used to observe anomalous tungsten deposition in the gap-edge between wafers. In the WF6-H2 atmosphere, three regions are identified: (i) an open-deposition region (region A), (ii) a half-sealed deposition region (region B), and (iii) an etching or tunnel region (region C). In the WF6-Ar atmosphere, there are only two regions: (i) an open deposition region (region A'), and (ii) a half-sealed deposition region (region B'). The third region disappears because HF does not form in the absence of H2. Different chemical reactions are expected in different regions, dictated by the local gas composition. A half-sealed structure model proposed here is supported by thermodynamic calculations, and applied to explain encroachment, wormholes, and other well-known effects during the chemical vapor deposition of tungsten from tungsten hexafluoride.
Shanghai Rainbow Chemistry Co., Ltd.
Contact:+86-21-64968086-5815/5812
Address:3rd floor, Building 7, 251 Faladi Road, Zhangjiang Hi-Tech Park, Pudong District, Shanghai, P.R. China
Shao Xing Empire Import&Export CO.,ltd
Contact:86-575-82127757
Address:11#, Weiwu Road, Shangyu Industrial Park, Hangzhou Bay, Hangzhou, Zhejiang Province, China
Neworld Chemical Co., Ltd Shanghai(expird)
Contact:+86-21-62202658
Address:11F, Blvd 2, No. 1969 PuXing Rd, Shanghai
Nanjing Yuance Industry&Trade Co., Ltd.
website:http://www.njyuance.cn/
Contact:+86-25-85439097
Address:B1702, Aoti Bldg, No. 130, Aoti Avenue, Nanjing, China
Changsha Huajing Powdery Material Technological Co., Ltd.
Contact:86-731-88879686
Address:Building 2, West Garden, Main Campus of Central South University, Changsha, Hunan Province, China
Doi:10.1021/jo0706271
(2007)Doi:10.1002/ejic.201200362
(2012)Doi:10.1016/S0040-4039(96)02464-1
(1997)Doi:10.1016/j.tet.2004.02.053
(2004)Doi:10.1016/S0008-6215(02)00407-X
(2003)Doi:10.1002/aoc.5998
(2020)
