On the formation of defects and morphology during chemical vapor deposition of tungsten

Article abstract of DOI:10.1149/1.2055085

Face-to-face wafers were used to observe anomalous tungsten deposition in the gap-edge between wafers. In the WF₆-H₂ atmosphere, three regions are identified: (i) an open-deposition region (region A), (ii) a half-sealed deposition region (region B), and (iii) an etching or tunnel region (region C). In the WF₆-Ar atmosphere, there are only two regions: (i) an open deposition region (region A'), and (ii) a half-sealed deposition region (region B'). The third region disappears because HF does not form in the absence of H₂. Different chemical reactions are expected in different regions, dictated by the local gas composition. A half-sealed structure model proposed here is supported by thermodynamic calculations, and applied to explain encroachment, wormholes, and other well-known effects during the chemical vapor deposition of tungsten from tungsten hexafluoride.

Full text of DOI:10.1149/1.2055085

Downloaded on 2015-06-08 to IP 137.99.31.134 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2015-06-08 to IP 137.99.31.134 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2015-06-08 to IP 137.99.31.134 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2015-06-08 to IP 137.99.31.134 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2015-06-08 to IP 137.99.31.134 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2015-06-08 to IP 137.99.31.134 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2015-06-08 to IP 137.99.31.134 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).