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Journal of the American Ceramic Society—Li et al.
Vol. 85, No. 6
II. Experimental Procedure
polished using a tripod-polishing technique,4 and some of them
were also ion-milled with an ion-milling machine (DuoMillTM
600, Gatan, Inc., Pleasanton, CA).
Six CVD-ZrO2 coating specimens were prepared at different
deposition times: 5, 10, 20, 30, 60, and 120 min. A hot-wall CVD
reactor was used for ZrO2 deposition. As schematically shown in
Fig. 1, the reactor chamber was made of a fused SiO2 tube (3.4
cm outside diameter and 34 cm length). A long as-received
Hi-NicalonTM fiber tow (Nippon Carbon Co., Tokyo, Japan)
was wrapped around a fused SiO2 holder to make approxi-
mately nine fiber tow specimens (ϳ25 cm long) for each
deposition experiment.
The reactor was heated using a resistance furnace with an
effective heating zone of ϳ30 cm. The temperature at the center
region of the reactor was measured and controlled using a K-type
thermocouple interfaced to a temperature controller. The pressure
inside the reactor chamber was controlled using a mechanical
vacuum pump and an exhaust valve (Type 253, MKS, Waltham,
MA) interfaced to a pressure controller (Type 252A, MKS) and a
capacitance manometer (Baratron, MKS). The reactor was oper-
ated using ZrCl4, CO2, and H2 as precursors at a temperature of
1050°C and a pressure of 4 kPa for the CVD experiments.
A 500 cm3 stainless steel vaporizer was used to hold ZrCl4,
which is a solid at room temperature. The vaporizer was kept at a
constant temperature of 190°C using heating tapes to maintain the
vapor pressure of ZrCl4. An argon stream was used to carry the
ZrCl4 vapor from the vaporizer to the reactor chamber. The flow
rates of argon, H2, and CO2 were controlled by mass flow meters
(Type 258, MKS, Andover, MA): 40 cm3/min for argon, 120
cm3/min for H2, and 120 cm3/min for CO2 at standard temperature
and pressure (STP).
Tensile tests were conducted at room temperature. The length of
fiber tow specimens was 20 cm. The entire length of each fiber tow
specimen was glued to a plastic strip (20 cm ϫ 2 cm ϫ 0.1 mm)
using a 5-min epoxy, except for the 2.5 cm gauge length. At least
five tows were tested for each condition. For comparison, five
flame-desized fiber tows were also tested. Flame-desizing was
achieved by slowly moving the fiber tow through a torch flame.
A field-emission scanning electron microscope (FEG-SEM;
Model DSM 982, LEO Electron Microscopy, Inc., Thornwood,
NY) and a LaB6 transmission electron microscope (Model CM30,
Philips, Eindhoven, Netherlands) were used for coating morphol-
ogy characterization. The phases in the ZrO2 coating were char-
acterized by selected-area electron diffraction (SAD) and
convergent-beam electron diffraction (CBED). The diffraction
patterns were indexed using electron microscopy simulation
tallographic data from a recent review paper3 on the crystal
structure of ZrO2 were used in analyzing the data. TEM specimens
were prepared by placing fiber tows of interest between two single
crystal silicon wafer pieces using an epoxy adhesive (M-Bond 610,
Measurement Group, Raleigh, NC). The “sandwich” specimens
were then cured for 2 h at 170°C in air and then cross-sectioned to
small coupons of 0.5 mm ϫ 2 mm ϫ 5 mm. The coupons were
A Dilor XY 800 triple stage Raman microprobe (JY, Inc.,
Edison, NJ) and an Innova 308C argon ion laser (Coherent, Inc.,
Santa Clara, CA) operating at 514.5 nm with a 100 mW output
power were used to detect the phase content of the CVD-zirconia
coating at Oak Ridge National Laboratory. The laser was focused
on areas of interest with an optical objective providing a spatial
resolution of 2 m. The method for calculating the phase content
was based on comparing the Raman peak heights of monoclinic
5
and tetragonal zirconia and is described in detail in Lance et al.
III. Results
Based on initial SEM results, three specimens were selected for
in-depth TEM investigation to study the morphologic evolution of
CVD-ZrO2 on the surface of Hi-Nicalon fiber as a function of
deposition time (5, 20, and 120 min). As shown in Figs. 2(a) and
(b), two distinct regions were observed for the ZrO2 coating
deposited for 5 min. In some regions, the ZrO2 coating was
continuous with a thickness of ϳ100 nm (Fig. 2(a)). The “contin-
uous” regions were characterized by SAD. The rings in the
diffraction pattern in Fig. 2(a) were indexed to c (cubic) and/or t
nanocrystallites, whereas the spots were assigned to larger c and/or
t particles. However, no m phase was observed in the continuous
regions.
Note that the c and t phases have very similar structures, and
therefore it is generally difficult to distinguish the c and t phases
based on diffraction patterns. To complement TEM analysis,
Raman microscopy was also used for phase determination. Even
though the CVD-ZrO2 coating after the 5 min deposition was too
thin to be detected by Raman microscopy, Raman data from other
CVD-ZrO2 coatings indicated that t was the only phase detected.
So we suppose that the phase indexed to be c/t by electron
diffraction patterns is mainly t phase. For the rest of the paper, we
will use the t notation to distinguish this phase indexed by TEM
from the m phase.
In other regions, the ZrO2 coating was discontinuous with
individual grains directly attached to the fiber surface. As shown in
Fig. 2(b), the grains were ϳ50 nm thick and ϳ50–100 nm long
along the fiber surface. Some of the grains were t, whereas the
others were m. Figs. 2(c) and (d) are high-resolution images of the
m particles with all the fringes corresponding to the (111) plane of
the m phase. Note that the (111) plane has the lowest surface free
energy for the m phase.6
Because the t phase is a high-temperature phase for ZrO2, the t
grains could not have been transformed from the m phase during
the CVD process at 1050°C or during cooling from the deposition
temperature. This argument implies that the t grains should have
been t when they were deposited at 1050°C. On the other hand, the
m grains observed by TEM could either be m phase when
deposited, or they could have transformed from the t phase during
the CVD process and/or the cooling step.
Figure 3 shows TEM images of the CVD–ZrO2 coating after the
20 min deposition. As shown in Fig. 3(a), delamination occurred
within the ZrO2 coating close to the fiber surface. This observation
indicates that a weak interface developed during this deposition
time period. In contrast, no debonding was observed between the
ZrO2 coating and the fiber or within ZrO2 coating after the 5 min
deposition. High-resolution images (Figs. 3(b) and (c)) show that
the inner ZrO2 layer retained on the fiber side is ϳ50–100 nm
thick and contains both t and m phases. It is interesting to note that
the t (111) plane and m (111) planes are almost normal to the
coating growth direction, suggesting the development of through-
thickness preferred orientations. Note that these planes represent
the lowest energy surfaces for their crystal structures.6 The
interface between the ZrO2 layer and the fiber surface was sharp,
indicating the absence of any major reaction there.
Based on the analysis of diffraction patterns collected at various
coating locations, the amount of the m phase present in the ZrO2
Fig. 1. Schematic diagram of the CVD apparatus used for ZrO2
deposition.