Bulletin of the Chemical Society of Japan p. 3193 - 3196 (1982)
Update date:2022-08-15
Topics:
Saeki, Yuzo
Matsuzaki, Ryoko
Yajima, Akimasa
Akiyama, Masayo
The reaction products of gaseous TiCl4 with ammonia were TiCl4*5NH3 at 200 deg C, TiCl4*5NH3, TiClN, and NH4Cl at 250-400 deg C, TiCl4*5NH3, TiClN, TiNx, and NH4Cl at 450-650 deg C, TiNx and NH4Cl at 700-1000 deg C, and TiNx, NH4Cl, and HCl at 1100-1400 d
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