Liquid injection metal organic chemical vapour deposition of lead–scandium–tantalate thin films for infrared devices
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Add time:07/28/2019 Source:sciencedirect.com
Lead–scandium–tantalate has been deposited in the perovskite form onto 100 mm diameter substrates by liquid injection metal organic chemical vapour deposition at substrate temperatures of 550–600°C . The deposition of the single metal oxides of lead, scandium and tantalum from Pb(thd)2, Sc(thd)3, and Ta(OEt)4(thd), respectively, have been systematically investigated as a function of substrate temperature and the metal oxide layers have been characterised. The conditions necessary for the formation of perovskite phase of lead–scandium–tantalate have been mapped as a function of perovskite composition and substrate temperature.
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