Growth kinetics of Mo, W, Ti, and Co silicides formed by infrared laser heating

Article abstract of DOI:10.1149/1.2086532

The growth kinetics of four metal silicides formed by infrared laser heating, MoSi₂, WSi₂, TiSi₂, and CoSi₂, were studied. Unfocused (1.4-2.5 mm radii) beams were scanned over thin metal films on Si substrates a

Full text of DOI:10.1149/1.2086532

Downloaded on 2015-03-08 to IP 132.174.255.116 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2015-03-08 to IP 132.174.255.116 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2015-03-08 to IP 132.174.255.116 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2015-03-08 to IP 132.174.255.116 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2015-03-08 to IP 132.174.255.116 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2015-03-08 to IP 132.174.255.116 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).

Downloaded on 2015-03-08 to IP 132.174.255.116 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).