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A. Bouravleuv et al.: Self-assenbled nanowhiskers grown by MBE on InP(001) surface
planted ZnO nanowhiskers [12]. Mn-doped CdS and ZnS nanowhiskers have been fabricated using a
core/shell methodology [13]. Furthermore, MnP nanorods were synthesized via thermal decomposition
of continuously delivered metal-phoshine complexes [14].
In this paper, we report on the molecular beam epitaxial growth and the characterization of MnP and
Ge self-assembled nanowhiskers on the InP(001) substrates.
2 Methods
Self-assembled (SA) nanowhiskers have been grown by conventional molecular beam epitaxy (MBE) on
InP(001) substrate using Knudsen cells for the Mn and Ge evaporation as well as cracking cell for the
decomposition of tertiarybutylphosphine (TBP) into P2 flux. The “epi-ready” InP(100) wafers were an-
nealed at 480 °C in vacuum inside a treatment chamber in a P2 flow for 20 minutes. The duration of
growth ranged from 30 minutes up to 2 hours at the temperatures between 430–545 °C which were con-
trolled using a temperature controller and an infrared pyrometer. The beam flux of Mn was adjusted in
the range between 0.5 – 0.9 × 10–8 Torr and that of Ge in the range between 0.9 – 1.5 × 10–8 Torr using an
ion gauge. The flow rate of TBP gas was set at 2.0 sccm by using a mass flow controller, whereas the
temperature of the cracking cell was kept in the range of 810 – 835 °C to assure efficient decomposition
of TBP into P2 during the MBE growth. The growth process was monitored using in-situ reflection high
energy electron diffraction (RHEED) measurements.
The morphology and microstructure of nanowhiskers were examined by scanning electron microscope
(SEM, Hitachi S-4500) and scanning transmission electron microscope (STEM, FEI TECNAI-F20).
Chemical compositions were measured using an energy-dispersive X-ray analysis (EDX) attached to the
SEM and STEM apparatus. The crystals were analyzed by X-ray diffraction technique using an X-ray
diffractometer (XRD, Philips X'Pert type). Temperature and magnetic-field dependences of magnetiza-
tion were measured by a superconducting quantum interference device (SQUID) and vibration sample
(VSM, TOEI VSM-5-19) magnetometers.
3 Results and discussion
3.1 Growth and structure of self-assembled nanowhiskers
The fabrication of self-assembled nanowhiskers was made possible by the development of the technol-
ogy of MnGeP2 thin film growth [15, 16], that is chalcopyrite-type ternary compound [15–17].
Contrary to usual above-mentioned metal catalyst vapour-liquid-solid (VLS) growth [3, 7], in our
experiments we did not use any preliminary tailor-made metal catalyst layer. SA nanowhiskers were
grown directly on InP(001) surface by MBE.
Figures 1a–d demonstrate a scanning electron microscopy images of SA nanowhiskers grown at dif-
ferent temperatures on InP(001) surface. At low temperatures around 435 °C the nanowhiskers with
typical diameters close to 20 nm and length up to 2 µm which are spaced at different intervals can be
obtained (Fig. 1a and b). These individual SA nanowhiskers have preferential direction which corre-
sponds to the 〈111〉 crystallographic orientation and seems to be dependent on the crystallographic form
and the orientation of the host substrate. Unfortunately, we cannot control the exact position of individual
nanowhiskers on the surface unlike the positions of nanowhiskers prepared according VLS growth mecha-
nism, since they can be preassigned by the distribution of preliminary fabricated nanosized metal cluster. In
spite of the fact, that individual nanowhiskers have a small dispersion in diameters, they differ greatly in
lengths which appear to be dependent on the time of growth. On further increasing the growth temperature
the microstructure and the distribution of nanowhiskers can be considerably modified (Fig. 1c and d).
Instead of widely distributed individual nanowhiskers, the arrays of SA nanowhiskers that have random
(Fig. 1c) or at higher temperatures solid (Fig. 1d) distribution on the InP(001) surface and different shape
with or without precipitated nanoclusters can be obtained.
© 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim