Full text of DOI:10.1063/1.108402

Organometallic chemical vapor deposition of tungsten metal, and suppression of
carbon incorporation by codeposition of platinum
Burkhard Niemer, Alfred A. Zinn, William K. Stovall, Paul E. Gee, Robert F. Hicks, and Herbert D. Kaesz
Citation: Applied Physics Letters 61, 1793 (1992); doi: 10.1063/1.108402
View online: http://dx.doi.org/10.1063/1.108402
View Table of Contents: http://scitation.aip.org/content/aip/journal/apl/61/15?ver=pdfcov
Published by the AIP Publishing
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
30.63.180.147 On: Mon, 24 Nov 2014 03:51:45
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This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
30.63.180.147 On: Mon, 24 Nov 2014 03:51:45
1

This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP:
30.63.180.147 On: Mon, 24 Nov 2014 03:51:45
1