Journal of the Electrochemical Society p. 1243 - 1250 (1985)
Update date:2022-08-16
Topics:
Green
Levy
Tungsten films have been selectively deposited by LPCVD via the reduction of WF//6 by either Si or H//2. Films formed by H//2 reduction can be unlimited in thickness; however, those formed by Si reduction are self-limited in thickness to about 150 angstro
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